The fully digital low-cost OEM components can be calibrated for methanol on request and are intended to be integrated into fuel cell and life-science applications. 

The high level of on-chip integration results in impressive potential for reductions in cost, size and weight. 

The key feature of the 4rdgeneration MEMS sensor chips is merging the sensor element with memory and digital intelligence for linearization and temperature compensation on the same MEMS sensor chip. 

The components enable bubble detection and accurate measurement of very low liquid flow rates down to micro- and nanoliters per minute with very short response times and outstanding repeatability. 

The thermal sensors work fully non invasive, since the MEMS chip is mounted on the outside of a glass capillary and senses through the wall of this channel (US Pat. 6813944). 

Apart from micro liter sensors the largest model available is designed for flow rates up to 20 ml/min. 

The degree of miniaturization of such sensors depends on customer needs regarding mechanics and power supply – a mid size standard component weights about 6 grams (see photo).

Contact: www.sensirion.com, info@sensirion.com, Tel. +41 44 306 40 00, Fax +41 44 306 40 30

About Sensirion:
Sensirion is a high-tech sensor company based in Zurich, Switzerland. Sensirion is the leading international supplier of intelligent CMOS-based sensor elements using patented CMOSensÒ Technology for humidity/temperature sensors, mass flow measurement and control devices for gases and liquids, and differential pressure sensors. Sensirion provides international OEM customers with tailored sensor system solutions for applications such as mass flow controllers, building automation modules, medical technology, and consumer goods. Sensirion customers benefit from intelligent system integration (integrated intelligence including calibration and digital interface) and can achieve cost savings thanks to easy system interfacing (ease of use) and modularity.